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本中心與台積電合作研發,提供二維材料微影製程服務,成果共同發表於重要國際電子元件會議2022IEDM
Terry Y.T. Hung1, Meng-Zhan Li1,4, Sheng-Kai Su1, Edward Chen1, Sui An Chou1, Walker Yun1, San Lin Liew2, Ying-Mei Yang3, Kuang-I Lin3, Vincent Hou2, T.Y. Lee1, Han Wang1, Albert Cheng1, Minn-Tsong Lin4,5,6, H.-S. Philip Wong7, and Iuliana P. Radu1, "pMOSFET with CVD-grown 2D semiconductor channel enabled by ultra-thin and fab-compatible spacer doping", 2022 International Electron Devices Meeting (IEDM).
1.Corporate Research, 2.Quality & Reliability, TSMC. 3.CFC, NCKU. 4.Dept. of Phys., NTU. 5.IAMS, Academia Sinica. 6.RCAS, Academia Sinica. 7.Corporate Research, TSMC, USA.